Vacuum / Clean Room rotary stages


Highly dynamic rotary stage with large aperture (79 mm)

HV, n x 360°, 0.0005° repeatability, 5 kg load

  • Vacuum: all ranges HV up to 10-8 mbar
  • Lubrication liquid up to 10-8 mbar
  • Max. Bakeout temperature: 100°C
Optionally configurable:
  • Available in magnetic and low magnetic versions
  • Material selection and vacuum lubrication adapted to the application
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

High precise and dynamic imaging

This compact and flat rotary stage achieves extremely high resolutions in vacuum during fast processes. Due to the large transmitted light of 79 mm, even large samples can be precisely positioned, measured and analyzed. It can be combined into sophisticated multi-axis systems and can be easily controlled via our FMC 400/450 controllers.

Fields of application

High precision and dynamic microscopy e.g. electron microscope, ion microscope, scanning electron microscope, scanning tunneling microscope, beamline instrumentation, synchrotron, materials research, materials analysis, wafer inspection, semiconductor quality control, semiconductor research

Travel[deg] n x 360
Repeatability unidirectional[deg]± 0.0003
Repeatability bidirectional[deg]± 0.0005
Positioning Speed[deg/s]200
Max. Load[N]49
Vacuum[mbar]up to 10-8  HV
Lubrication liquid[mbar]up to 10-8
Max. Bakeout temperature[deg]100
Magnetism Versionsmagnetic  | low-magnetic
GuideStainless Steel
FeedbackLinear Scale


Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

    1. Your customized system

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Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Are you looking for the best technical solution? Get in touch with us:

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0