DT155
Vacuum / Cleanroom rotary stages

782326:034.24

High-resolution rotary stage with large aperture

UHV, DUV / EUV, cleanroom ISO 6, n x 360°, rep 0.0003°, speed 300°/s, load 5 kg

Cleanroom: variants up to class ISO 6 (higher on request)

Vacuum: all ranges HV / UHV up to 10^-11 mbar

Lubrication: liquid up to 10^-8 mbar / dry up to 10^-11 mbar

Max. Bakeout temperature: 100°C

Optionally configurable:

Available in magnetic and low magnetic versions (magnet-free on request)
Material selection and lubrication adapted to the application
Optional with controller FMC400/450
Customized development with 3D design, prototypes, series production

High precise and dynamic imaging

This compact and flat rotary stage achieves extremely high resolutions in vacuum during fast processes. Due to the large transmitted light of 79 mm / 3", even large samples can be precisely positioned, measured and analyzed. It can be combined into sophisticated multi-axis systems and can be easily controlled via our FMC 400/450 controllers.

Fields of application

High precision and dynamic microscopy e.g. electron microscope, ion microscope, scanning electron microscope, scanning tunneling microscope, beamline instrumentation, synchrotron, materials research, materials analysis, wafer inspection, semiconductor quality control, semiconductor research

Spezifikationen

DT155		-NM
Travel	[deg]	n x 360
Repeatability unidirectional	[deg]	± 0.0003
Repeatability bidirectional	[deg]	± 0.0005
Positioning speed	[deg/s]	200
Max. speed	[deg/s]	300
Max. load Fx	[N]	49
Length	[mm]	200
Width	[mm]	155
Height	[mm]	35
Weight	[kg]	1.7
Turntable	[mm]	Ø 150
Aperture	[mm]	Ø 79 (3")
Lubrication liquid	[mbar]	up to 10-8
Lubrication dry	[mbar]	up to 10-11
Max. Bakeout temperature	[deg]	100
Motor		Nanomotion (Piezo)
Bearing		2 Thin-section bearings, stainless steel
Feedback		Angular Scale
Resolution Measuring system		0.00005°
Optional features		custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants cleanroom		up to cleanroom class ISO 6 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants magnetism		magnetic, low-magnetic (magnet-free on request)
Variants vacuum		all ranges up to 10E-11 mbar HV / UHV

Änderungen vorbehalten. Werte gelten für Einzelachsen mit unseren Controllern. Hier angegeben sind typische Werte für eine Standardausführung. Durch individuelle Anpassungen und bei genauer Kenntnis Ihrer Anwendung können deutlich verbesserte Werte erreicht werden.