DT105-NM
Vacuum / Cleanroom rotary stages
782326:024.24, 782326:037.24
High-resolution rotary stage with aperture
HV / UHV, DUV, cleanroom ISO 6, n x 360°, rep 0.0005°, 3 kg load, speed 270°/s
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Optionally configurable:
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High-resolution imaging under limited installation space
This compact and flat rotary stage achieves extremely high resolutions in vacuum during fast processes. The 36 mm transmitted light allows precise positioning, measurement and analysis of small samples. It can be combined into demanding multi-axis systems and is easily controlled by our FMC 400/450 controllers.
Fields of application
High precision and dynamic microscopy e.g. AFM, electron microscope, ion microscope, scanning electron microscope, scanning tunneling microscope, laboratory microscopy, imaging systems, sample analysis, beamline instrumentation, synchrotron, material research, material analysis
| DT105 | -1NM-W | -2NM-W | |
| Travel | [mm] | n x 360 | n x 360 |
| Repeatability unidirectional | [μm] | ± 0.0005 | ± 0.0005 |
| Repeatability bidirectional | [μm] | ± 0.001 | ± 0.001 |
| Positioning speed | [mm/s] | 180 | 180 |
| Max. speed | [mm/s] | 270 | 270 |
| Max. load Fz | [N] | 10 | 30 |
| Max. load torque Mz | [Nm] | 0.4 | 0.8 |
| Length | [mm] | 150 | 150 |
| Width | [mm] | 105 | 105 |
| Height | [mm] | 32 | 32 |
| Weight | [kg] | 1.3 | 1.3 |
| Turntable | [mm] | Ø 150 | Ø 150 |
| Aperture | [mm] | Ø 36 | Ø 36 |
| Lubrication liquid | [mbar] | up to 10-8 | up to 10-8 |
| Lubrication dry (Special configuration) | [mbar] | up to 10-11 | up to 10-11 |
| Max. Bakeout temperature | [deg] | 100 | 100 |
| Motor | 1 Nanomotion (Piezo) | 2 Nanomotion (Piezo) | |
| Bearing | stainless steel | ||
| Feedback | angular scale | ||
| Resolution Measuring system | 0.00005° | ||
| Optional features | Four-point contact ball bearings for liquid lube, equipment with up to 4 motors for higher loads, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | ||
| Variants clean room | up to clean room class ISO 6 (higher on request) | ||
| Variants beam | UV, DUV (EUV, X-ray, gamma on request) | ||
| Variants Magnetism | magnetic, low-magnetic (magnet-free on request) | ||
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV | ||
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