HT240
Vacuum / Cleanroom lifting stages

782331:117.26

Precise high load vertical lifting stage

UHV, DUV / EUV, cleanroom ISO 4, travel 25 mm, rep 0.3 µm, 40 kg load

Cleanroom: variants up to class ISO 4 (higher on request)

Vacuum: all ranges HV / UHV / EUV up to 10^-9 mbar

Lubrication liquid up to 10^-8 / dry up to 10^-9 mbar

Max. Bakeout temperature: 120°C

Options:

Material selection and lubrication adapted to the application
Version for cleanroom, vacuum and beam
Optional with controller FMC400/450
Customized development with 3D design, prototypes, series production

Precise lifting stage for high loads up to 40 kg

The lifting stage is suitable for high-precision vertical movements under extreme conditions, such as in high vacuum, ultra-high vacuum. Due to its lift-wedge principle, it achieves its parameters despite its low overall height of 90 mm. The combination of stepper motor and a precise ball screw, optional lead screw, enables smallest step sizes at comparatively high loads.

Application areas

Precision positioning in industry and research in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, wafer inspection, camera alignment, materials research, materials analysis, inspection, microscopy in vacuum, beamline, accelerator, synchrotron

Spezifikationen

HT240		-SM	-SM-L
Travel	[mm]	25	25
Repeatability unidirectional	[μm]	± 1.7	± 0.3
Repeatability bidirectional	[μm]	± 2.7	± 0.5
Positioning speed	[mm/s]	2.2	2.2
Max. speed	[mm/s]	4.4	4.4
Max. load Fx	[N]	440	440
Max. load Fy	[N]	440	440
Max. load Fz	[N]	410	410
Length	[mm]	460	460
Width	[mm]	240	240
Height	[mm]	90	90
Weight	[kg]	14
Lubrication liquid	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-9
Max. Bakeout temperature	[deg]	120
Drive		Ball Screw 1412./1.12.145.175R P3P
Motor		Stepper Motor
Bearing		Profile Rail, stainless steel, dry
Feedback		Open Loop	Linear Scale
Resolution Measuring system		-	0.1 µm
Optional features		lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 4 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants magnetism		magnetic
Variants vacuum		all ranges up to 10-9 mbar HV / UHV

Änderungen vorbehalten. Werte gelten für Einzelachsen mit unseren Controllern. Hier angegeben sind typische Werte für eine Standardausführung. Durch individuelle Anpassungen und bei genauer Kenntnis Ihrer Anwendung können deutlich verbesserte Werte erreicht werden.