Vacuum Custom Systems


XY stage with stability in the nanometer range

Very stable xy-stage with aperture and 10 mm stroke. Made for loads of up to 20 kg. The system is dry running. Goal was to build a stage with the highest stiffness possible. This is achieved by the use cross roller bearings and additional piezo pincer brakes which act upon reaching the desired position giving it additional stability.

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Contact Person for Vacuum Custom Systems

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0