Linear Axes

Our linear axes are universal in use and can be integrated easily in the setup of various applications.

Motors
Feedback
High performance stage (linear motor), travel 250 - 750 mm, rep ± 0.4 µm, load 4.5 kg, speed 1500 mm/s
High load stage (linear motor), travel up to 2000 mm, rep ± 0.4 µm, load up to 25 kg, Speed up to 3090 mm/s
High performance stage (air bearing), travel 500 - 2000 mm, rep ± 0.3 µm, load 10 kg, speed 3090 mm/s
Focus axis (ball screw), travel 25 - 50 mm, rep ± 0.5 µm, load 4.5 kg in X/Y/Z, speed 60 mm/s
Focus axis (ball screw), travel 25 - 50 mm, rep ± 1.6 µm, load 4.5 kg in X/Y/Z, speed 60 mm/s