3 Axis Beam Aligner
Vacuum / Cleanroom Multi Axes Systems
782300:087.26
This positioning system is based on MT53 stages with piezo-drives. Two of those stages are used for xz-motion. Apart from xz another stage of the same make is situated. Because of extreme tight space the corners of each stage and even its linear guide rails had to chamfered.
| 782300:087.26 | X | Y | Z | |
| Standard System | MT53-5-PM | MT53-10-PM | MT53-5-PM | |
| Travel | [mm] | 5 | 50 | 20 |
| Repeatability unidirectional | [μm] | ± 0.2 | ± 0.2 | ± 0.2 |
| Repeatability bidirectional | [μm] | ± 0.3 | ± 0.3 | ± 0.3 |
| Positioning speed | [mm/s] | 5 | 5 | 5 |
| Max. speed | [mm/s] | 10 | 10 | 10 |
| Max. load Fx | [N] | 5 | 5 | 5 |
| Max. load Fy | [N] | 8.8 | 8.8 | 8.8 |
| Max. load Fz | [N] | 8.8 | 8.8 | 8.8 |
| Length | [mm] | 195 | ||
| Width | [mm] | 75 | ||
| Height | [mm] | 70 | ||
| Lubrication liquid | [mbar] | up to 10-8 | ||
| Lubrication dry | [mbar] | up to 10-11 | ||
| Max. Bakeout temperature | [deg] | 120 | ||
| Motor | Piezo Motor | |||
| Bearing | cross roller bearings stainless steel, hybrid, optional full ceramic | |||
| Feedback | Linear Scale | |||
| Resolution Measuring system | 0.1 µm, optionally up to 0.005 µm | |||
| Optional features | custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | |||
| Variants clean room | up to clean room class ISO 6 (higher on request) | |||
| Variants beam | UV, DUV (EUV, X-ray, gamma on request) | |||
| Variants magnetism | magnetic, low-magnetic, magnet-free | |||
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV | |||
Used Standard Components
MT53-PM
