XYZ Phi inspection system suitable for 12 inch wafers, printed circuit boards (clean room ISO 2)
Inspection and Mikroscopy


Universal 4-axis granite gantry with cleanroom housing

This XYZ Phi positioning system can be used for various test and inspection processes in semiconductor and electronics manufacturing up to cleanroom class ISO 2. Due to the design of the travels up to 320 x 320 mm in XY, it is suitable for all standard wafer sizes up to 12 inches. Samples are manipulated with high precision to a laser, sensor or camera in the Z-axis using the linear motor-driven KT405-320-EDLM mechanical stage. The sensor or camera is adjusted in vertical movement (maximum 50 mm) with the PMT160-050-DC-R/L precision measuring stage, which can optionally be supplemented with a swivel unit..


High-precision testing in demanding cleanrooms

  • Ideal for demanding test and inspection processes in semiconductor technology, biotechnology and the pharmaceutical industry
  • Fast adaptation to different measurement and testing tasks
  • High-precision measurement with repeatability up to 0.3 µm at high speeds up to 100 mm/s
  • Safety concept with protective cover
  • Emission-free up to clean room ISO class 2
  • Delivery of the system with granite base on dampers, steel frame incl. control complete with protective hood and painted housing

Optionally expandable:

  • ISO 14644-1 versions (up to class 1 on request)
  • Swivel arm for sensor with rotary axis DT200
  • Base plate made of granite or aluminum
  • Other travels and different samples
  • Adaptable for integration into automated processes
  • Immediate use with pre-configured controller incl. exemplary software

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests



Fields of application

Assembly / inspection / quality assurance of 12 inch wafers, chipping / crack / defect detection, surface inspection, layer thickness measurement with one sensor, inspection of chips, dies, pins, bonding, printed circuit boards, solar cells







[mm; deg]

320 320 5020

Repeatability unidirectional

[µm; deg]

± 0.3 ± 0.3 ± 0.30.004

Repeatability bidirectional

[µm; deg]

± 0.4

± 0.4 ± 0.40.006

Positioning speed

[mm/s; deg/s]

100 100 3.430

Max. load


15 15 ± 15068

Ironless Dynamic Linear Motor

Ironless Dynamic Linear Motor

Feedback Linear Scale Linear Scale Linear Scale


Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

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Are you looking for the best technical solution?

Get your first 3D design in just a few days:

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0