Double XYZ wafer positioner for scanners, microscopes and wafers up to 12 inch / 300 mm (clean room ISO2) | Stroke 720 x 720 x 100 mm
Inspection and Mikroscopy
High throughput screening of wafers up to 12"
The inspection system with travel ranges up to 720 mm provides simultaneous high dynamic inspection of multiple 300 mm / 6" wafers. The completely ready-to-use motion system, consisting of the axes, the granite base with gantry, the cable management and the motion controller can be individually configured according to the customer's requirements.
Automated inspection in 3-shift operation
Individual extensions and customizations
Engineering services include the fitting of the systems to your structure and the desired motion control or the completely individual solution development with 3D design for the application-specific positioning task.
Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests
Fields of application
Wafer and mask inspection up to 12 inch / 300 mm, Metrology, Microscopy, Materials inspection, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chips, measurement of complicated geometric shapes
|± 0.3||± 0.3||± 1.5|
|± 0.4||± 0.7||± 2.5|
|Max. speed||[mm/s; deg/s]||1500||1500||300|
|Length x width x height||[mm]||1230 x 1200 x 1030|