Double XYZ wafer positioner for scanners, microscopes and wafers up to 12 inch / 300 mm (clean room ISO2) | Stroke 720 x 720 x 100 mm
Inspection and Mikroscopy


High throughput screening of wafers up to 12"

The inspection system with travel ranges up to 720 mm provides simultaneous high dynamic inspection of multiple 300 mm / 6" wafers. The completely ready-to-use motion system, consisting of the axes, the granite base with gantry, the cable management and the motion controller can be individually configured according to the customer's requirements.

Automated inspection in 3-shift operation

  • Ideal for automated inspection of wafers with:
    - 2x X-axes each for scanners / microscopes up to 25 kg
    - 2x Y-axes each for chucks / sample carriers up to 23 kg
  • Highly dynamic positioning up to max. 1000 mm/s with travel ranges up to 720 mm
  • Designed for use in 3-shift operation up to clean room class ISO 2
  • Low maintenance due to fast system replacement on the granite structure

Optionally expandable:

  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Connections for exhaust and revolving belt covers
  • Available also as single portal
  • Ready-to-use control system with pre-configured controller incl. sample software
  • Individual solution development with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely individual solution development with 3D design for the application-specific positioning task.

Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests


Fields of application

Wafer and mask inspection up to 12 inch / 300 mm, Metrology, Microscopy, Materials inspection, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chips, measurement of complicated geometric shapes






[mm; deg]

720 720 100

Repeatability unidirectional

[µm; deg]

± 0.3 ± 0.3 ± 1.5

Repeatability bidirectional

[µm; deg]

± 0.4 ± 0.7 ± 2.5

Positioning speed

[mm/s; deg/s]

750 750 150
Max. speed [mm/s; deg/s] 1500 1500 300

Max. Load


150 150 ± 200



Ironless Dynamic Linear Motor

Ironless Dynamic Linear Motor

AC Servo





Ball Screw


Linear Scale


Linear Scale



Length x width x height[mm] 1230 x 1200 x 1030


Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

    1. Your customized system

    1. Your contact details
    1. *lease read our data protection regulations here before sending the contact form.

Are you looking for the best technical solution?

Get your first 3D design in just a few days:

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0