Double XYZ positioning system for automated inspection - wafer / probe cards (clean room), long travels up to 720 mm


High-precision, high-throughput quality assurance for cleanroom applications

This inspection system consists of four cleanroom axes and enables automated measurement of multiple objects simultaneously. High dynamics and highest reproducibility are achieved. A high-resolution camera or sensor is moved relative to the sample to inspect geometries, perform measurements and document special quality features.

Automated and low-maintenance 24/7 inspection

  • Ideal for automated inspection of wafers, probe cards and printed circuit boards
  • Inspection of multiple objects simultaneously through travels up to 720 mm
  • Ideal for integration of two processes simultaneously
  • Low-maintenance 24/7 operation and flexible maintenance concept due to fast system exchange on the granite structure

Optionally expandable:

  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Connections for exhaust and revolving belt covers
  • Available also as single portal
  • Ready-to-use control system with pre-configured controller incl. sample software

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests


Fields of application

Inspection of large wafers, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chips, measurement of complicated geometric shapes






[mm; deg]

820 820 100

Repeatability unidirectional

[µm; deg]

± 0.3 ± 0.5 ± 0.5

Repeatability bidirectional

[µm; deg]

± 0.4 ± 0.7 ± 0.7

Positioning speed

[mm/s; deg/s]

750 750 150

Max. Load


70 70 ± 270



Ironless Dynamic Linear Motor


Ironless Dynamic Linear Motor








Ball Screw


Profile rail


Profile rail

Cross roller bearings



Linear Scale


Linear Scale




Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

    1. Your customized system

    1. Your contact details
    1. *lease read our data protection regulations here before sending the contact form.

Are you looking for the best technical solution?

Get your first 3D design in just a few days:

Dipl.-Ing. Elger Matthes

Phone: +49 (0) 351 88585-0