XYZ inspection portal for automated measuring of wafers, probe cards (clean room), long travels up to 720 mm


High-precision quality inspection for cleanroom applications

This inspection system (shown here without cover) is specially designed for automated quality assurance of large wafers, probe cards and printed circuit boards. The positioning system allows positioning along two linear axes. A high-resolution camera or sensor is moved relative to the sample to inspect geometries, perform measurements and document special quality features. The system is controlled by a separate motion controller for three axes.

Increased throughput by automated and low-maintenance 24/7 inspection

  • Simultaneous inspection of multiple wafers, probe cards and printed circuit boards through travels up to 820 mm
  • Reduced cycle time with speeds up to 150 mm/s and accelerations of 2 m/s2
  • Precise measurement results and enormous quality improvements with repeatability up to 1 µm
  • Low-maintenance 24/7 operation and flexible maintenance concept due to fast system exchange on the granite structure

Special features:

  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Connections for dust extraction and rotating belt covers
  • Controller with software libraries for LabView, C, C++, C#, MathLab and others on request

    Fields of application

    Inspection of large wafers, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chip, measurement of objects on complicated geometric shapes






    [mm; deg]

    820 820 100

    Repeatability unidirectional

    [µm; deg]

    ± 0.3 ± 0.5 ± 0.5

    Repeatability bidirectional

    [µm; deg]

    ± 0.4 ± 0.7 ± 0.7

    Positioning speed

    [mm/s; deg/s]

    750 750 150

    Max. Load


    70 70 ± 270



    Ironless Dynamic Linear Motor


    Ironless Dynamic Linear Motor








    Ball Screw


    Linear Scale


    Linear Scale




    Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

      1. Your customized system

      1. Your contact details
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    Are you looking for the best technical solution? Get in touch with us:

    Nadine Strudel

    +49 (0) 351 88585-44