MP95-3 Miniature XYZ Positioning System, cartesian | Ball Screw, DC Motor, Linear Scale | Rep ± 1.5 µm | Travel 40 x 40 x 40 mm
Compact Multi Axis Stages

782327:060.26

High-precision Cartesian XYZ System

The XYZ positioning system is a cartesian oriented positioning system consisting of three miniature linear stages (3 x MT95). It achieves very good performance with its cross roller guides. The powerful drive, consisting of a gear box and ball screw, is completely integrated into the positioning system, ideal for limited dimensions.

Ideal for the alignment of components and additional axes

XYZ travels up to 40 mm for compact dimensions (145 x 95 x 130 mm)

Very high-resolution, step-by-step corrections in the three lateral directions

Repeatability up to 1.5 µm

Options:

Adaptation to the process: sample, sample holder, feeder, robot, sensor
Version for clean room ISO 14644-1 (up to class 1 on request
Version for vacuum and magnet-free
Individual solution finding with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completelyprototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Micromachining and microassembly, setup of multi-axis applications for alignment of Micro-Electro-Mechanical Systems (MEMS), wafer sample tests, optics assembly, semiconductor testing, laboratory automation, research and development, customized mechanical production

Specifications

782327:060.26		X	Y	Z
Travel	[mm]	40	40	40
Repeatability unidirectional	[µm]	± 1.5	± 1.5	± 1.5
Repeatability bidirectional	[µm]	± 3.5	± 3.5	± 3.5
Positioning speed	[mm/s]	1.1	1.1	1.1
Max. speed	[mm/s]	2.2	2.2	2.2
Max. load	[N]	30	65	65
Motor		DC-Motor	DC-Motor	DC-Motor
Drive		Ball Screw	Ball Screw	Ball Screw
Feedback		Motor-Encoder	Motor-Encoder	Motor-Encoder
Length x width x height	[mm]	145 x 95 x 130