XZ System for Laboratory and Wafer Inspection | Ball Screw, DC Motor, Cross Roller, Linear Measuring System
Combinations of laboratory axes


High precision and modular 3-axis system

The XZ combination consists of the high-precision and durable standard linear axes of the PMT160. This combination is suitable for all applications requiring perfect flatness, smallest tolerances for pitch and yaw, and smooth running behavior. The XZ system is ready to use with controller as well as software and operates with reliable parameters.


Flexible, instantly operational and tested

  • Ideal for setting up and expanding of your application
  • Highly precise repeatability up to 0.4 µm
  • Smallest steps and highest reliability at comparatively high positioning speed of 50 mm/s
  • Perfect flatness of ± 1 for positioning medium loads up to 5 kg
Optional expandable:
  • Different travels per axis from 50 - 300 mm
  • Rotational movements in combination with DT130 or DT200
  • Various motor variants: DC motor, stepper motor, linear motor and nanomotion
  • Immediate use with pre-configured controller incl. exemplary software
  • Versions for clean room ISO 14644-1

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests


Fields of application

wafer inspection, layer measurement, laboratory test systems, automatic optical inspection (AOI), 3D imaging, microscopy, imaging systems, multi-axis system for laboratory applications, quality assurance, 3-axis sensor measurement, wafer inspection, semiconductor quality insurance




Used standard component PMT160-DCPMT160-DC


[mm; deg]



Repeatability unidirectional

[µm; deg]

± 0.4

± 0.4

Repeatability bidirectional

[µm; deg]

± 2.2

± 2.2

Positioning speed

[mm/s; deg/s]



Max. load








Drive Ball Screw Ball Screw


Linear Scale

Linear Scale


Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

    1. Your customized system

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Are you looking for the best technical solution? Get in touch with us:

Nadine Strudel

+49 351 88585-44