X Phi system for the positioning of optical lenses, cylinders e.g. stylus gauge | X DC motor, ball screw, cross roller, linear measuring system | Phi AC servo, angle measuring system
Combinations of laboratory axes


Excellent stability for enormous resolutions

This X-Phi positioning system consists of high-precision and durable standard axes of the PMT160 linear stage and, for rotation, the DTS130-HM. It is ideal for measuring applications in which the specimen is moved precisely into measuring position and thus no additional feed axis is required.

Highly precise and reliable measurement results

  • Ideal for optical measurement of round parts e.g. wafers, optics
  • Saves the additional purchase of a loading axis due to high-precision rotary movements with stroke
  • High repeatability up to 0.0017
  • Moves 1.9 µm precisely with X into the measuring position

Optionally configurable:

  • Travels up to 300 mm
  • Base plate made of granite or aluminum
  • Available with internal scale (270 mm)
  • Can be combined with other rotary stages, e.g. DT200
  • Versions for clean room ISO 14644-1 possible
  • Immediate use with pre-configured controller incl. exemplary software

    Individual extensions and customizations

    Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we like to adapt the systems to the environmental requirements of your application e.g.: dust, radiation, temperature, Precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, test protocol, life tests

    Fields application

    Ideal for two-dimensional optical detection of roughness, structure mapping, surface structures, laboratory application, semiconductor inspection, optical inspection systems, quality assurance, motion system stylus gauge

    782300:212.26  X Phi (Rz)
    Used standard component PMT160-DCDTS130-HM

    [mm; deg]


    n x 360

    Repeatability unidirectional

    [µm; deg]

    ± 1.9

    ± 0.0017

    Repeatability bidirectional

    [µm; deg]

    ± 2.4

    ± 0.005

    Positioning speed [mm/s, deg/s] 10 50

    Max. load








    Drive Ball Screw


    Linear Scale

    Angular Scale


    Specifications are subject to change. Values are for the single axis with our controller. Parameters shown here are typical values for a standard configuration. By customization and given in depth knowledge of your application significantly improved values can be achieved.

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    Are you looking for the best technical solution? Get in touch with us:

    Nadine Strudel

    +49 351 88585-44