A number of factors have an effect on the accuracy. Temperature changes will have the greatest effect in most cases. This is accordingly more severe the longer the system is, and naturally also depends on the temperature difference.
The second most influential factors are regularly pitch and yaw. No table really moves completely straight, which means that there is always a certain curve movement. The further the object for positioning is from the guide track or scale, the stronger the effect of this curve passage will be (outer curve longer than inner curve).
In third position, are faults in the measuring system, followed by mechanical clearance and controller Hysteresis.