Wafer inspection and metrology

For you we find customized solutions for non-contact optical inspection of wafers, probe cards, dies and microchip components. For this purpose, we offer systems for layer thickness measurement, contact inspection, electrical characterization, probe head positioning, sample manipulation and metrology of wafer microstructures in the nanometer range.

More than 100 m2
Cleanroom assembly area

cleanroom requirements ISO 14644-1 up to class 1

10-12 mbar
residual pressures

for your high-tech innovations

5 nm
under extreme conditions

HV, UHV, EUV, radiation or extreme temperatures

Configure the solution for your applications now

Inform us abour your exact requirements online, so that you can reach your targets as soon as possible.

    1. Your customized system

    1. Your contact details
    1. *lease read our data protection regulations here before sending the contact form.

Individual customization and development of your Innovaiton

  • Optimal positioning solution for your application with a fast and free 3D design
  • Design of functional samples, prototypes up to series production
  • Integrated development of your mechanics, electronics and software

Customization to your specific process requirements

Cleanroom systems up to Class 1

On more than 100 m2 of cleanroom space, we exclusively manufacture high-precision and particle-free state-of-the-art technology for cleanroom systems up to ISO 14644-1 Class 1.

More on series development

Vacuum standard axes up to 10-12

Our high-precision modular vacuum axes have proven themselves over decades. They withstand the most extreme life tests with 24/7 operation in the submicron range. Go to Vacuum Standard axes

Individual life cycle tests

We implement your life cycle tests for you at our numerous universal test stands for various individual test scenarios in our measurement laboratories.

More about test and measurement

Are you looking for the best technical solution?

We are positioning your idea, no matter how unorthodox it is. Get in touch with us:


Was spricht für uns mehr, als unsere Kunden?

Dipl.-Ing. Elger Matthes
Development, Consulting,
Concepts, Innovation

+49 351 88585-0

Nadine Strudel

+49 351 88585-44