Wafer inspection and metrology

For you we find customized solutions for non-contact optical inspection of wafers, probe cards, dies and microchip components. For this purpose, we offer systems for layer thickness measurement, contact inspection, electrical characterization, probe head positioning, sample manipulation and metrology of wafer microstructures in the nanometer range.

OEM Positioning Systems

Multi Axes Systems

Vacuum / Clean Room

Standard Axes & Stages

Screw drives